Analysis of Ferroelectric Negative Capacitance-Hybrid MEMS Actuator Using Energy–Displacement Landscape

We propose an energy-based framework to analyze the statics and dynamics of a ferroelectric negative capacitance-hybrid microelectromechanical system (MEMS) actuator. A mapping function that relates charge on displacement movable electrode is used obtain Hamiltonian hybrid actuator in terms displacement. then use graphical energy–displacement phase portrait plots static pull-in, dynamic pull-out phenomena Using these, we illustrate low-voltage operation step inputs, when compared standalone MEMS The results obtained are agreement with analytical predictions numerical simulations. proposed enables straightforward inclusion adhesion between contacting surfaces, modeled using van der Waals forces. show pull-in voltage not affected, while reduced due adhesion. provides physics-based tool design capacitance-based actuators.